TESCOM™ 64-3600 Series Highly Sensitive Pressure Regulator

64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy® trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4" point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes.

Specifications

Pressure RatingMaximum Inlet Pressure: 600 or 3500 psig / 41.4 or 241 bar <br>Outlet Pressure Ranges: 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar
Body Material316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish
DiaphragmHastelloy®
Valve SeatPCTFE, Teflon PFA® or Vespel®
Stem & Valve Spring316 Stainless Steel
Remaining Parts316 Stainless Steel or Hastelloy®
Operating TemperatureTeflon® PFA Seat: -40 to 160°F / -40 to 71°C<br>Vespel® Seat: -40 to 350°F / -40 to 177°C<br>PCTFE Seat: -40 to 140°F / -40 to 60°C<br>
Port Size & Type1/4, 1/2 <br>Male Swivel, Female Swivel, Male Fixed, HPIC<br>1/4 Tube Stubs
Flow CapacityCv = 0.15 or 0.06
Weight2 lbs / 0.9 kg
Additional InformationFor custom modifications or a complete system solution, please contact your local sales office.