Semiconductor manufacturers are tasked with meeting an ever-increasing global demand for their products while controlling costs in a resource-intensive fabrication process that demands high-quality, high-purity yields. Unscheduled downtime and compromised batches can have immediate and significant impacts on delivery schedules and profits.
In the effort to maintain efficient and safe fabrication environments, every component within gas delivery systems, clean-rooms and contaminant purging systems is essential. Working with equipment suppliers with global reach and deep expertise in semiconductor manufacturing processes is also key to modernizing existing fabrication plants and ensuring new facilities meet the highest standards of operation and expected throughput.
With Emerson, semiconductor manufacturers and OEMs supporting them gain the right combination of technological innovation, reliability, and the capacity to bring system intelligence to the fabrication process. Our precision controls of temperature, flow, pressure and position help manufacturers implement gradual, modular improvements to their applications, while our sophisticated digitized solutions can also bring you to the cutting edge of predictive maintenance and optimized wafer yields.
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The AVENTICS Series AV03/AV05 provide a reliable basis for both compact handling systems and complex automation solutions. Within machine safety the Series AV03/AV05 offers intelligent solutions that significantly reduce your effort in creating a safe design. With the integration of the fieldbus and I/O-modules of the Series AES, also all requirements for distributed control are available. The Series AV03/AV05 is easy to configure, easy to use and easy to extend as well as IIoT futureproof thanks to the integration of OPC UA and the Digital Twin
449-254 Series high purity, high flow pressure reducing regulators are ideal for high pressure bulk specialty gas delivery systems (BSGS). The 449-254 Series offers a Cv = 1.0, surface finish of 10 Ra and is available with Hastelloy® trim. Inlet pressure is 1500 psig / 103 bar with outlet pressures up to 400 psig / 27.6 bar.
23 Series ultra high purity in-line regulator offers 10 Ra microinch finish with high flow capabilities up to 950 SLPM. The tied diaphragm 23 Series provides an internally springless and threadless design with inlet pressure of 250 psig / 17.2 bar and outlet pressure up to 100 psig / 6.9 bar. Ideal for use in high flow in-line regulator excellent for purging.
64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers 10 Ra microinch / 0.25 micrometer surface finish and is available in Hastelloy<sup>®</sup> trim. Maximum flow rates are up to 31.8 SCFM / 900 SLPM, with inlet pressures of 150, 1000, 1500 psig / 10.3, 69.0, 103 bar and outlet pressures up to 200 psig / 13.8 bar. Ideal for use in Bulk Specialty Gas Systems (BSGS), 1/2" point-of-use, tool hook-ups and gas cabinets.
74-3000 Series ultra high purity pressure reducing regulator offers 5 Ra or 10 Ra surface finishes, high flow Cv = 0.5 and an internally threadless and low internal volume design. Inlet pressures are 600, 1000, or 3500 psig / 41.3, 69, or 241 bar with outlet pressures up to 150 psig / 10.3 bar. Ideal for use in high flow purging systems, 1/2" point-of-use, regulation of specialty gases and semiconductor manufacturing.
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Semiconductor manufacturing is the industrial process used to create computer chips for today’s electronic devices such cellphones, computers, TV’s, refrigerators, and automobiles.
Emerson’s solutions ensure high purity of the process with minimal media contamination. Our products deliver reliable performance in harsh conditions and are ideal for use in a stringent clean room environment. Engineered for dependable and efficient operation under the challenging conditions of semiconductor manufacturing, our products and solutions provide high performance and a high degree of dependability, resulting in a reliable and optimized chip making process.
Critically, Emerson products deliver superior operation in the presence of specialty gases, which helps to reduce maintenance and downtime and proactively prevent or remediate production issues.
Digital transformation of semiconductor wafer fabrication can deliver transparency, precision, and accuracy in every step of the manufacturing process, and harvest data that can improve plant efficiency and productivity.
Data is the key factor in digitization. As one example, pressure changes are difficult to perceive without real-time and historical data and may not manifest as a problem until there are negative impacts on wafer quality or productivity levels. Digital transformations allow operators to detect minute pressure deviations and proactively address leakages or other problems before there is any impact on production or quality.
Many corrosive, flammable gases and chemicals such as hydrogen sulfide, hydrogen bromide and tungsten hexafluoride are essential to semiconductor manufacturing. They also can cause serious injuries to operators or physical damage to machines that handle them.
Preventative maintenance depends on developing a comprehensive story about machine health. By accessing data in real time, you can make informed, preemptive decisions about your manufacturing systems and service assets before problems emerge, and result in lower productivity, damages, or wasteful energy usage. Maintenance can be restricted to planned service periods, and the plant can avoid problems caused by leaks, corrosion, or other degradations that can occur incrementally.
Wafer fabrication is an energy-intense process. Around 46 liters of ultrapure water are required to manufacture one square inch of a microchip. The power utilization footprint of one square inch of microchip is around 7.5 kWh.
In addition to water and power, tremendous amounts of corrosive gases are used in the process. The demand for power and water is so high for semiconductor fabrication that a seasonal drought can jeopardize factory output. Semiconductor plant factories typically consume water equivalent to a mid-sized city’s usage per day.
As a result, sustainability initiatives for semiconductor manufacturers are not just about reducing costs. They also help ensure operational continuity. It is critically important to implement systems that can help you monitor every aspect of energy and water consumption, detect leakages, and keep equipment proactively maintained.
Our fluid control and pneumatic products are designed to deliver superior performance, even in the presence of specialty gases that are essential to wafer and chip fabrication. Equipped with IIoT sensors and advanced connectivity, they help you monitor temperature, flow, pressure, and position control with greater precision and energy efficiency than is possible with analog systems.
Our proportional control, general purpose, and cryogenic valves, pressure control solutions, and pneumatic controllers can provide you with highly calibrated process control that is essential to attaining the highest reliability standards in semiconductors. Additionally, our unparalleled global network can help you maintain the most demanding schedules with minimal downtime and production disruption.
