Semiconductor manufacturers are tasked with meeting an ever-increasing global demand for their products while controlling costs in a resource-intensive fabrication process that demands high-quality, high-purity yields. Unscheduled downtime and compromised batches can have immediate and significant impacts on delivery schedules and profits.
In the effort to maintain efficient and safe fabrication environments, every component within gas delivery systems, clean-rooms and contaminant purging systems is essential. Working with equipment suppliers with global reach and deep expertise in semiconductor manufacturing processes is also key to modernizing existing fabrication plants and ensuring new facilities meet the highest standards of operation and expected throughput.
With Emerson, semiconductor manufacturers and OEMs supporting them gain the right combination of technological innovation, reliability, and the capacity to bring system intelligence to the fabrication process. Our precision controls of temperature, flow, pressure and position help manufacturers implement gradual, modular improvements to their applications, while our sophisticated digitized solutions can also bring you to the cutting edge of predictive maintenance and optimized wafer yields.
Related Products
AVENTICS AV03/AV05 系列为紧凑搬运系统和复杂自动化解决方案奠定可靠基础。AV03/AV05 提供智能的机器安全解决方案，降低您在创造安全设计中的工作量。AES 整合了现场总线和 I/O 模块，并符合分布式控制的所有要求。AV03/AV05 系列易于配置、使用和扩展，并且而且由于 OPC UA 和数字孪生技术的集成，该系列产品能对未来 IIoT 长久支持
449-254 系列高纯度、高流量减压阀非常适合用于高压大宗特种气体输送系统 (BSGS)。449-254 系列提供 Cv=1.0 的流通能力，表面光洁度为 10 Ra，并配备 Hastelloy® 阀内件。入口压力为 103bar/1500psig，出口压力可高达 27.6bar/400psig。
23 系列超高纯度直连式减压阀具有 10 Ra 微英寸的光洁度，且流通能力高达 950SLPM。23 系列使用束缚膜片，采用内部无弹簧且无螺纹设计，入口压力为 17.2bar/250psig，出口压力可达 6.9bar/100psig。非常适合用于高流量直连式减压阀，是吹扫应用的理想选择。
64-3200 系列超高纯度、高流量束缚膜片减压阀提供 0.25 微米/10 Ra 微英寸的表面光洁度，并可提供 Hastelloy<sup>®</sup> 阀内件。最大流量可达 900SLPM/31.8SCFM，入口压力为 10.3、69.0、103bar/150、1000、1500psig，出口压力可高达 13.8bar/200psig。非常适合用于大宗特种气体系统 (BSGS)、1/2" 使用点、工具连接以及气柜。
74-3000 系列超高纯度减压型调压器具备 5Ra 或 10Ra 的表面光洁度，提供 Cv = 0.5 的流通能力，并采用内部无螺纹和较小内体积设计。入口压力为 600、1000 或 3500psig/41.3、69 或 241bar，出口压力可高达 150psig/10.3bar。非常适合用于高流量吹扫系统、1/2" 使用点、特种气体调节和半导体制造。
Show More Products
Semiconductor manufacturing is the industrial process used to create computer chips for today’s electronic devices such cellphones, computers, TV’s, refrigerators, and automobiles.
Emerson’s solutions ensure high purity of the process with minimal media contamination. Our products deliver reliable performance in harsh conditions and are ideal for use in a stringent clean room environment. Engineered for dependable and efficient operation under the challenging conditions of semiconductor manufacturing, our products and solutions provide high performance and a high degree of dependability, resulting in a reliable and optimized chip making process.
Critically, Emerson products deliver superior operation in the presence of specialty gases, which helps to reduce maintenance and downtime and proactively prevent or remediate production issues.
Digital transformation of semiconductor wafer fabrication can deliver transparency, precision, and accuracy in every step of the manufacturing process, and harvest data that can improve plant efficiency and productivity.
Data is the key factor in digitization. As one example, pressure changes are difficult to perceive without real-time and historical data and may not manifest as a problem until there are negative impacts on wafer quality or productivity levels. Digital transformations allow operators to detect minute pressure deviations and proactively address leakages or other problems before there is any impact on production or quality.
Many corrosive, flammable gases and chemicals such as hydrogen sulfide, hydrogen bromide and tungsten hexafluoride are essential to semiconductor manufacturing. They also can cause serious injuries to operators or physical damage to machines that handle them.
Preventative maintenance depends on developing a comprehensive story about machine health. By accessing data in real time, you can make informed, preemptive decisions about your manufacturing systems and service assets before problems emerge, and result in lower productivity, damages, or wasteful energy usage. Maintenance can be restricted to planned service periods, and the plant can avoid problems caused by leaks, corrosion, or other degradations that can occur incrementally.
Wafer fabrication is an energy-intense process. Around 46 liters of ultrapure water are required to manufacture one square inch of a microchip. The power utilization footprint of one square inch of microchip is around 7.5 kWh.
In addition to water and power, tremendous amounts of corrosive gases are used in the process. The demand for power and water is so high for semiconductor fabrication that a seasonal drought can jeopardize factory output. Semiconductor plant factories typically consume water equivalent to a mid-sized city’s usage per day.
As a result, sustainability initiatives for semiconductor manufacturers are not just about reducing costs. They also help ensure operational continuity. It is critically important to implement systems that can help you monitor every aspect of energy and water consumption, detect leakages, and keep equipment proactively maintained.
Our fluid control and pneumatic products are designed to deliver superior performance, even in the presence of specialty gases that are essential to wafer and chip fabrication. Equipped with IIoT sensors and advanced connectivity, they help you monitor temperature, flow, pressure, and position control with greater precision and energy efficiency than is possible with analog systems.
Our proportional control, general purpose, and cryogenic valves, pressure control solutions, and pneumatic controllers can provide you with highly calibrated process control that is essential to attaining the highest reliability standards in semiconductors. Additionally, our unparalleled global network can help you maintain the most demanding schedules with minimal downtime and production disruption.
